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    • Process-Induced Work Function Modulations of TaxAl1-xNy Metal Gate Electrodes
    Conference
    SISC
    Author
    H.N. Alshareef, K. Choi, H.C. Wen, R. Harris, H.F. Luan, M. Quevedo-Lopez, P. Majhi, B.H. Lee
    Year
    2005
    Date
    2005
    학회구분
    International
    H.N. Alshareef, K. Choi, H.C. Wen, R. Harris, H.F. Luan, M. Quevedo-Lopez, P.Majhi, and B. H. Lee, “Process-Induced Work Function Modulations of TaxAl1-xNy Metal Gate Electrodes”, SISC, (2005).