Fast relaxation behavior and its implication on the measurement in high-k gate dielectric
Conference
SISC
Author
R. Choi, B.H. Lee, K. Mathur, C.D. Young, G. Bersuker, Y. Zhao
Year
2005
Date
2005
학회구분
International

R. Choi, B. H. Lee, K. Mathur, C.D. Young, G. Bersuker, Y. Zhao , “Fast relaxation behavior and its implication on the measurement in high-k gate dielectric”, SISC, (2005).