Carbon condensation and Germanium sublimation in GeC films by pulse laser annealing
Conference
17th Korean Conference on Semiconductors (KCS)
Author
C.H. Cho, S.H. Kim, S.K. Lim, S.Y. Lee, H.J. Hwang, H. Hwang, B.H. Lee
Year
2010
Date
2010
학회구분
Domestic

C.H.Cho, S.H.,Kim, S.K.Lim, S.Y.Lee, H.J.Hwang, H.Hwang, B.H.Lee, "Carbon condensation and Germanium sublimation in GeC films by pulse laser annealing", 17th Korean Conference on Semiconductors (KCS), (2010).