Carbon condensation and Germanium sublimation in GeC films by pulse laser annealing
- Year
- 2010
- Date
- 2010
- 학회구분
- Domestic
C.H.Cho, S.H.,Kim, S.K.Lim, S.Y.Lee, H.J.Hwang, H.Hwang, B.H.Lee, "Carbon condensation and Germanium sublimation in GeC films by pulse laser annealing", 17th Korean Conference on Semiconductors (KCS), (2010).