Test Structures for Accurate UHF C-V measurement for Nano-Scale CMOSFETs with HfSiON and TiN Tetal Gate
Conference
ICMTS
Author
K.T. Lee, G.A. Brown, H. Dawei, R. Choi, S.C. Song, B. H. Lee, O.S. Yoo, H.D Lee and Y-H Jeong
Year
2007
Date
2007
학회구분
International
File
2007_ICMTS_KTLEE.pdf (3.6M) 0회 다운로드 DATE : 2021-04-05 00:33:48