Comparison of Plasma-Induced Damage in SiO2/TiN and HfO2/TiN Gate Stacks
Conference
IRPS
Author
C.D. Young, G. Bersuker, F. Zhua, K. Matthews, R. Choi, S.C. Song, H.K. Park, J.C. Lee and B. H. Lee
Year
2007
Date
2007
학회구분
International
File
2007_IRPS_CDYOUNG.pdf (3.9M) 0회 다운로드 DATE : 2021-04-05 00:34:23