목록 게시판 리스트 옵션 검색 Comparison of Plasma-Induced Damage in SiO2/TiN and HfO2/TiN Gate Stacks Conference IRPS Author C.D. Young, G. Bersuker, F. Zhua, K. Matthews, R. Choi, S.C. Song, H.K. Park, J.C. Lee and B. H. Lee Year 2007 Date 2007 학회구분 International File 2007_IRPS_CDYOUNG.pdf (3.9M) 0회 다운로드 DATE : 2021-04-05 00:34:23