목록 게시판 리스트 옵션 검색 Effect of in situ plasma treatment on high-k films after high-k removal with plasma etching from the S/D region Conference IRPS Author B.S.Ju, S.C.Song, T.H.Lee, B.Sassman, C.Y.Kang, B. H. Lee, R.Jammy Year 2007 Date 2007 학회구분 International File 2007_IRPS_BSJU.pdf (2.8M) 0회 다운로드 DATE : 2021-04-05 00:35:54
