Highly Manufacturable MoAlN PMOS Electrode for 32nm Low Standby Power Applications
Conference
Symp. on VLSI Tech
Author
H.-C. Wen, S.C. Song, C.S. Park, C. Burhamn, G. Bersuker, O. Sharia, A. Demkov, B. S. Ju, M. A. Quevedo-Lopez., H. Niimi, K. Choi, H. B. Park, P. S. Lysaght, P.Majhi, B. H. Lee and R. Jammy
