Electrical Characterization Methodologies for the Assessment of High-k Gate Dielectric Stacks
Conference
ECS Trans.
Author
C.D. Young, G. Bersuker, D. Heh, R. Choi, C.Y. Kang, J. Tun, and B. H. Lee
Year
2007
Date
2007
학회구분
International
File
2007_ECS-TRANS_CDYOUNG.pdf (870.8K) 0회 다운로드 DATE : 2021-04-05 00:41:08