nMOSFET Reliability Improvement attributed to the Interfacial Dipole formed by La Incorporation in HfO2
Conference
SSDM
Author
C. Y. Kang, P. Kirsch, D. Heh, C. Young, P. Sivasubramani, G. Bersuker, S. C. Song, R. Choi, B. H. Lee, J. Lichtenwalner, J. S. Jur, A. I. Kingon, R. Jammy
Year
2007
Date
2007
학회구분
International