Band Edge Effective Work Function of Ru Based Metal Gate Electrode for pMOSFET
- Conference
- 4th Int. Symp. on Adv. Gate Stack Tech.
- Author
- C. S. Park, S. C. Song, G. Bersuker, H. B. Park, C. Burham, B. H. Lee, and R. Jammy
- Year
- 2007
- Date
- 2007
- 학회구분
-
International
