A Comparative Study of NMOSFETs with HfLaSiON and HfLaON
Conference
4th Int. Symp. on Adv. Gate Stack Tech.
Author
W.-H.Choi, I.-S. Han, H.-M. Kwon, T.-G. Goo, M.-K. Na, H.-S. Joo, O.-S. Yoo, G-W Lee, C. Y. Kang, R. Choi, S.C. Song, B. H. Lee, R. Jammy, Y.-H. Jeong and H.-D. Lee
