Flexible, simplified CMOS on Si(110) with Metal Gate/High-k for HP and LSTP
Conference
Tech. Dig. of IEDM
Author
H. R. Harris, S. E. Thompson, S. Krishnan, P. Kirsch, P. Majhi, C. E. Smith, M. M. Hussain, G. Sung, S. C. Song, R. Choi, H. Adhikari, S. Suthram, B. H. Lee, H. -H. Tseng, R. Jammy