목록 Mechanism of Vfb roll-off in High Work function Metal Gate and Low Temperature Oxygen Incorporation to Achieve PMOS Band Edge Work function Conference Tech. Dig. of IEDM Author S. C. Song, C. S. Park, J. Price, C. Burham, R. Choi, H. H. Tseng, B. H. Lee, and R. Jammy Year 2007 Date 2007 학회구분 International File 2007_IEDM_SCSONG.pdf (3.7M) 0회 다운로드 DATE : 2021-04-05 01:41:12