포항공대 EESL Fearless challenge

Mechanism of Vfb roll-off in High Work function Metal Gate and Low Temperature Oxygen Incorporation to Achieve PMOS Band Edge Work function

Conference

Tech. Dig. of IEDM

Author

S. C. Song, C. S. Park, J. Price, C. Burham, R. Choi, H. H. Tseng, B. H. Lee, and R. Jammy

Year

2007

Date

2007

학회구분

International

File

2007_IEDM_SCSONG.pdf (3.7M) 0회 다운로드 DATE : 2021-04-05 01:41:12