Effect of Si cap layer on interface quality and NBTI in Ge-on-si with HfSiO for High Mobility Channel pMOSFETs
Conference
4th Int. Symp. on Adv. Gate Stack Tech.
Author
O.S. Yoo, J.W. Oh, K.S. Min, C.Y. Kang, K.-T. Lee, M.K. Na, S.C. Song, R. Choi, B. H. Lee e, P. Majhi, H-H Tseng and H.-D. Lee
Year
2007
Date
2007
학회구분
International
File
2007_ISAGST_OSYOO.pdf (319.9K) 0회 다운로드 DATE : 2021-04-05 01:43:31