Relaxation of FN stress induced Vth shift in nMOSFETs with HfSiON and TiN gate
Conference
Proc. of Device Research Conference
Author
R.Choi, B. H. Lee, J.H.Sim, G.Bersuker, L.Larson, J.C.Lee
Year
2004
Date
2004
학회구분
International
File
2004_DRC_R.Choi.pdf (147.2K) 0회 다운로드 DATE : 2021-04-05 01:51:57