Enhanced Surface Preparation Techniques for the Si/High-k Interface
- Conference
- Ultra Clean Processing of Silicon Surfaces Conference VII, Solid State Phenomena
- Author
- J. Barnett, C. D. Young, N. Moumen, G. Bersuker, J. J. Peterson, G. A. Brown, B. H. Lee, and H. R. Huff
- Year
- 2004
- Date
- 2004
- 학회구분
-
International
