An Improved Methodology for Gate Electrode Work Function Extraction in SiO2 and High-k Gate Stack Systems Using Terraced Oxide Structures
Conference
SISC
Author
G. A. Brown, G. Smith, J. Saulters, K. Matthews, H.-C. Wen, H. AlShareef, P. Majhi and B. H. Lee
Year
2004
Date
2004
학회구분
International