Characterizing Hf-Based Bulk Film Properties Using Ultra-short Pulse I-V Measurement
Conference
SISC
Author
C.D. Young, R. Choi, B. H. Lee, G. Bersuker, P. Zeitzoff, J.H. Sim, H.R. Harris, and G.A. Brown
Year
2004
Date
2004
학회구분
International