Drastic reliability improvement using H2O2/UV treatment of HfO2 for heterogeneous integration
Conference
IEEE International Reliability Physics Symposium (IRPS)
Author
S.M. Kim, T.M.H. Nyugen, J.W. Oh, Y.S. Lee, S.C. Kang, H.I. Lee, C.H. Kim, S. Some, H.J. Hwang and B.H. Lee*
Year
2021
Date
2021
학회구분
International
File
2021_IRPS_SMKim.pdf (1.4M) 7회 다운로드 DATE : 2021-06-22 10:28:51

논문제목: Drastic reliability improvement using H2O2/UV treatment of HfO2 for heterogeneous integration


학회명: 2021 IEEE International Reliability Physics Symposium (IRPS)

저자: S.M. Kim; T.M.H. Nyugen; J.W. Oh; Y.S. Lee; S.C. Kang; H.I. Lee; C.H. Kim; S. Some; H.J. Hwang; B.H. Lee


DOI: 10.1109/IRPS46558.2021.9405126