포항공대 EESL Fearless challenge

Drastic reliability improvement using H2O2/UV treatment of HfO2 for heterogeneous integration

Conference

IEEE International Reliability Physics Symposium (IRPS)

Author

S.M. Kim, T.M.H. Nyugen, J.W. Oh, Y.S. Lee, S.C. Kang, H.I. Lee, C.H. Kim, S. Some, H.J. Hwang and B.H. Lee*

Year

2021

Date

2021

학회구분

International

File

2021_IRPS_SMKim.pdf (1.4M) 8회 다운로드 DATE : 2021-06-22 10:28:51

Link

https://ieeexplore.ieee.org/document/9405126 345회 연결