포항공대 EESL Fearless challenge

R-G-B CW laser annealing for Si Source/drain activation

Conference

NANO KOREA

Author

H.J.Hwang, S.M.Kim, B.H.Kang, K.S.Kim, R.H.Baek, B.H.Lee

Year

2022

Date

2022

학회구분

International

File

Nano Korea 2022_HJHwang_TS09T_P_14.pdf (293.3K) 4회 다운로드 DATE : 2022-07-14 13:40:23