Physical Characteristics of HfO2 Dielectrics at the Physical Scaling Limit
Conference
Proc. of VLSI-TSA
Author
P. S. Lysaght, J. C. Woicik, M. A. Sahiner, P. D. Kirsch, G. Bersuker, B.-H. Lee and R. Jammy
Year
2008
Date
2008
학회구분
International
File
2008_VLSITSA_PSLYSAGHT.pdf (596.4K) 0회 다운로드 DATE : 2021-04-01 19:08:18