Study of continuous-wave RGB laser annealing for the activation of phosphorus/boron-doped Si deep junction with high scan speed
Conference
IEEE EDTM 2023
Author
Seung Mo Kim, Min Gyu Kwon, Hae-Won Lee, Ki Sung Kim, Bohyeon Kang, Hyongsuk Choo, Jin-Hong Park, Rock-Hyun Baek, Hyeon Jun Hwang and Byoung Hun Lee
Year
2023
Date
2023
학회구분
International
File
EDTM2023_KSM_Abs.pdf (235.2K) 5회 다운로드 DATE : 2023-03-30 13:37:05