Electrical characteristics of sub-5 nm SnO2 deposited using Atomic Layer Infiltration (ALI) process
Conference
IEEE EDTM 2023
Author
Hae-Won Lee, So-Young Kim, Ho-In Lee, Yongsu Lee, Seung-Mo Kim, Hyeon Jun Hwang and Byoung Hun Lee
Year
2023
Date
2023
학회구분
International
File
EDTM2023_LHW_Abs.pdf (263.3K) 5회 다운로드 DATE : 2023-03-30 13:38:20