Ultra-thin and High-quality Pt-Silicidation using CW Laser Annealing Process
Conference
2024 International VLSI Symposium on Technology, Systems and Applications (VLSI TSA)
Author
Seung Mo Kim, Min Gyu Kwon, Taekyu Woo, Ki Sung Kim, Yongsu Lee, Hyeon Jun Hwang, Joon Kim1 and Byoung Hun Lee
Year
2024
Date
2024
학회구분
International
File
2024_VLSI-TSA_KSM.pdf (834.7K) 2회 다운로드 DATE : 2024-07-23 19:35:00