Achieving Low Vt <-0.3V and Thin EOT ~1.0nm in Gate First Metal/High-k pMOSFET for High Performance CMOS Applications
Conference
Proc. of VLSI-TSA
Author
C. S. Park, G. Bersuker, S. C. Song, H. B. Park, C. Burham, B. S. Ju, C. Park, P. Kirsch, B. H. Lee and R. Jammy
Year
2008
Date
2008
학회구분
International
File
2008_VLSITSA_CSPARK.pdf (513.9K) 0회 다운로드 DATE : 2021-04-01 19:10:19