Reliability characterization of metal electrode/high-k dielectric stacks for 45nm node beyond
Conference
Proc. of IWDTF, Tokyo. Japan
Author
B.H.Lee, G. Bersuker, D. Heh, H. Park, C.Y. Kang, C. Young, H. Tseng
Year
2008
Date
2008, Invited
학회구분
International