Gate stack technology for nano-scale CMOS devices
Conference
IWDTF, Tokyo. Japan
Author
B.H.Lee, C.S. Park, P. Kirsch, J. Huang, P. Sivasubramani, C.Burham, D.Gilmer, C.Y.Kang, P.Lysaght, G.Bersuker, P.Majhi, R.Harris, H.Tseng and R.Jammy
Year
2008
Date
2008, Invited
학회구분
International