Gate stack technology for nano-scale CMOS devices
- Conference
- Int. MRS, Chongging, China
- Author
- B.H.Lee, C.S. Park, P. Kirsch, J. Huang, P. Sivasubramani, C.Burham, D.Gilmer, C.Y.Kang, P.Lysaght, G.Bersuker, P.Majhi, R.Harris, H.Tseng and R.Jammy
- Year
- 2008
- Date
- 2008, Invited
- 학회구분
-
International
