Breakdown in the metal/high-k gate stack: Identifying the “weak link" in the multilayer dielectric
Conference
Proc. of Int. Electron Device Meeting, p.791
Author
G. Bersuker, D. Heh, C. Young, H. Park, P. Khanal, L. Larcher, A. Padovani, P. Lenahan, J. Ryan, B. H. Lee, H. Tseng, R. Jammy
Year
2008
Date
2008
학회구분
International
File
2008_IEDM_GBERSUKER.pdf (354.9K) 0회 다운로드 DATE : 2021-04-01 19:25:22