포항공대 EESL Fearless challenge

A Novel Damage-Free High-k Etch Technique Using Neutral Beam Assisted Atomic Layer Etching (NBALE) for Sub-32nm Technology Node Low Power Metal Gate/High-k Dielectric CMOSFETs

Conference

Proc. of Int. Elect. Dev. Meeting

Author

K.S.Min, C.Y.Kang, C.Park, C.S.Park, B.J.Park, J.B. Park, M.Hussain, J.C.Lee, B.H.Lee, P.Kirsch, H.H. Tseng, R.Jammy, G.Y.Yeom

Year

2009

Date

2009

학회구분

International

File

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