Forming gate oxide having multiple thickness
Inventor
A.Chou, M.Chudzik, T.Furukawa, O.Glueschenkovm P.Kirsch, B.H.Lee, K.Onishi, H.Park, K.Scheer, A.Sekiguchi
No.
7,160,771
출원국가
국외
Year
2007
Date
2007